Electronic Grade Diiodosilane

CAS # : 13760-02-06
Synonym : DIS

Technical specs :

Purity, By GC: ≥99.8%; Specification, By ICP-MS: ≥99.9999995%; TMI ≤5ppb

Industry/application :

Applied in ultra-thin silicon-based film deposition for next-generation advanced logic and memory chips, passivation layers of MEMS microdevices and epitaxial thin films of third-generation semiconductors, compatible with high-end semiconductor processes sensitive to chlorine.

Certifications :

ISO,COA,MSDS,TDS

PDF files :

Product Overview

Electronic grade diiodosilane with ultra-high purity and low impurities. It features high activity of Si-I bonds, stable decomposition at low temperature, controllable silicon deposition rate and dense pinhole-free films. Iodine byproducts can be easily purged, compatible with ultra-low temperature ALD/CVD processes.

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